| 摘要 |
PURPOSE:To efficiently and inexpensively form electrodes such as bump electrodes by press-bonding a melted ball formed by heating one end of a wire, and disconnecting it from the wire. CONSTITUTION:The end of a wire 17 is melted by a discharge torch 20, and a melted ball 21 is formed. The ball 21 is bonded to a pad 13 by pressing while an ultrasonic vibration is being applied by a capillary 15. A clamper 10 clamps the mid portion of a wire 17 to rise together with the capillary 15. Thus, the wire 17 is disconnected from the room portion 21a of the ball 21 to form a bump electrode 22. Since an electrode material is sequentially supplied in a wire state to form the electrode 22, the electrode can be efficiently formed. Thus, the inexpensive bump electrode can be formed. |
