| 摘要 |
PURPOSE:To obtain the titled body having a less tendency for generating out of focus of an image even if in case of repeated use at a high temp. and moisture atmosphere for long periods, by constituting a surface layer from an amorphous carbon composed of carbon and hydrogen as a main component. CONSTITUTION:The titled body is composed of a substrate 1, a photosensitive layer 2 and the surface layer 3 which is made from the amorphous carbon contg. carbon and hydrogen as the main component. If the titled body contains a large amount of hydrogen, thereby increasing-CH2-bond and-CH3 bond contd. in the film, and as the hardness of the film is damaged, the content of hydrogen contd. in the film is necessary to be <=50atom%. The surface layer 3 is preferably composed of carbon and hydrogen as the main component, and is formed by decomposing a gas of a hydrocarbon compd. or its gaseous compd. according to the plasma CVD method. As the surface layer 3 has a very high surface hardness, the titled body having less tendency for generating a flaw due to a cleaning blade and a claw for peeling a paper, and out of focus of the image, even if in case of any and all operating conditions, is obtd. |
