| 摘要 |
PURPOSE:To reduce the generation of a problem about quality of a crystalline of the photosensitive layer by inserting a spacer between a supporting body and a substrate, thereby rapidly controlling the temperature of the substrate with a narrow controlling range while depositing the photosensitive layer on the substrate. CONSTITUTION:The depositing material 2 for example the pure selenium is filled in an evaporating source 1 which is provided with the vacuum vessel. The photosensitive layer is vacuum- deposited on the surface of the cylindrical aluminium substrate 5 interposing the spacer 6 between the supporting axis 4 and the substrate 5 by heating the depositing material with a heater 3. The spacer 6 is a hollow body which is sealed tightly. The heating medium 7 is sealed in the hollow body. The heat transmission to the supporting axis 4 from the substrate 5 while depositing is effected between the substrate 5 and the spacer 6, and between the supporting axis 4 and the spacer 6 by conduction respectively, and is effected in the hollow of the spacer by convection. As the contact surfaces among the supporting axis 4, the spacer 6 and the substrate 5 are pressed from the spacer side by a pressure of about 1atm, thereby sticking them with each other, the heat conduction among them is very good, whereby the heat transfer is rapidly effected between the supporting axis 4 and the substrate 5, and enable to the good temperature control which has a good heat responsibility. |
