| 摘要 |
PURPOSE:To improve the response of automatic matching in an impedance matching by changing the revolving speed of a motor depending on the displacement of the impedance matching value. CONSTITUTION:The titled controller consists of a high frequency detector 1, amplifiers 2, 16, forward/reverse detectors 4, 18 discriminating the polarity of a high frequency detection signal, voltage frequency converters 5, 19 converting the amplified detection signal into a pulse signal, motor controllers 6, 20 receiving the signal of the detectors 4, 18 and the pulse signal and controlling the motor, motors 7, 21 and variable capacitors 28, 29. The signals of the high frequency detector is subject to voltage frequency conversion and pulse motors 7, 21 form an automatic matching circuit driving the variable capacitors 28, 29. The motors 7, 21 drive the variable capacitors 28, 29 at a low speed near the impedance matching and at a high speed when the impedance is deviated from the matching point to change the capacitor of the variable capacitors 28, 29 thereby improving the response of the automatic matching.
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