发明名称 APPARATUS FOR PRODUCING ELECTROPHOTOGRAPHIC SENSITIVE BODY
摘要 PURPOSE:To stabilize glow discharge by providing auxiliary electrodes of the same potential as the potential of plural rotatable-revolvable cylindrical conductive base bodies into the spacing between said bodies with an apparatus for producing a photosensitive body which uses the above-mentioned base bodies as one electrode and forms a photosensitive layer on the base bodies by a plasma CVD method using the glow discharge. CONSTITUTION:This apparatus for producing the electrophotographic sensitive body uses the plural rotatable-revolvable cylindrical conductive base bodies 13 as one electrode and forms the photosensitive layer on the base bodies 13 by the plasma CVD method using the glow discharge. The auxiliary electrodes 16 of the same potential as the potential of the base bodies 13 are provided in the spacings between the base bodies 13. A gaseous raw material is introduced into a reaction vessel 11 via a branch pipe 18 and the auxiliary electrodes 16.
申请公布号 JPS62149875(A) 申请公布日期 1987.07.03
申请号 JP19850291391 申请日期 1985.12.24
申请人 FUJI ELECTRIC CO LTD 发明人 HARA KENICHI;HINATA NAOHISA;KAZAMA TOYOKI;AIZAWA KOICHI
分类号 C23C16/24;C23C16/50;G03G5/08 主分类号 C23C16/24
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