| 摘要 |
PURPOSE:To make it possible to select abrasives, which have the optimum particle diameters for removing burr regardless of the distance between the pins of an IC, by performing ultrasonic wave washing after wet honing, thereby removing the clogging and attachment of the abrasives. CONSTITUTION:Ultrasonic waves are applied to a material to be treated through liquid, and the material to be treated undergos wet honing treatment. At this time, abrasives, which are clogged in fine gaps, are removed. Namely, an ultrasonic wave generator is attached in a suitable tank. The material to be treated is immersed in the tank. Water can be used as the liquid used in the ultrasonic wave washing. In the case the abrasives are rigidly clogged, it is better to use an organic solvent having light specific gravity since the more powerful ultrasonic waves can be obtained with the same output power. |
