| 摘要 |
PURPOSE:To prevent adhesion of particles on a disc substrate by introducing a reducing gas in a discharge gas at vacuum deposition so as to prevent oxidation of target and arc discharge. CONSTITUTION:A bell jar 1 is evacuated, argon, hydrogen gas are introduced from bombs 4, 5, and the disc substrate 8 on a counter electrode 7 is vapor- deposited from a target 6. Thus, the recording material for heat mode of the target 6 is not oxidized and no power is concentrated on atoms of the material, arc discharge is prevented to avoid defects in the recording film, the gases 4, 5 are supplied automatically in the bell jar 1 with a determined partial pressure so as to improve the practicability.
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