| 摘要 |
PURPOSE:To provide superior durability, moisture resistance and characteristics necessary for a sensitive body by regulating the quantity of energy used to decompose gas to a specified value per unit volume of gas when a surface layer of hydrogenated amorphous carbon is formed on an amorphous silicon-base photosensitive layer. CONSTITUTION:An amorphous silicon-base photosensitive layer and a surface layer of hydrogenated amorphous carbon are successively formed on an electrically conductive substrate by RF glow discharge decomposition to produce an electrophotographic sensitive body. At this time, the quantity of energy used to decompose fed gaseous starting material is regulated to 300-2,000J/cc during the formation of the surface layer. |
