| 摘要 |
PURPOSE:To make it possible to perform continuous plasma treatment of the inside surface of a gas-permeable porous tube, by separating a reaction tube by diaphragms, providing the fore section with an inlet for a treatment gas and providing a central section confined by the diaphragms with an independent vacuum system. CONSTITUTION:A treatment gas, such as in inorganic gas such as He, Ar, N2, O2 or H2 or an organic gas which forms a polymer, enters a reaction tube 1 from an inlet 4 for treatment gas and flows into the fore section and a rewinding chamber 11 in the reaction tube 1. A tube 10 to be treated, which is a gas-permeable porous body, is rewound from a rewinding bobbin 7 and runs through the inside of the reaction tube 1. At this time, the treatment gas as an atmosphere diffuses through the pores of the tube 10 and spreads in the inside number of the tube. The treatment gas forms a flow path directing from the fore section of the reaction tube to the rear section in the inside chamber. The tube 10 passes through the diaphragm 2 and enters the central section of the reaction tube 1. A discharge is generated by excitation by high- frequency radiation and a discharge is generated preferentially in the inside chamber of the tube because of a difference in the pressure between the inside and the outside of the tube, so that plasma treatment of the inside surface of the tube can be performed effectively. |
