| 摘要 |
PURPOSE:To prevent contamination of wafers even if dust falls due to vibration and the like, by forming a transfer means on cassettes, where the wafers are not present, and on a boat and transferring the wafers. CONSTITUTION:When a wafer is transferred from a cassette 1 to a boat 2, the wafer is taken out of the cassette, which is closest to the boat 2, and mounted on the wafer mounting position on the boat, which is farthest from the cassette. Thereafter, the wafers are sequentially taken out of the cassettes 1 at the positions, which are separated father from the boat, and transferred to the wafer mounting positions of the boat, which are closer to the cassettes 1, in sequence. When the wafers are transferred from the boat 2 to the cassette 1, the wafer at the wafer mounting position of the boat 2, which is closest to the cassette 1, is taken out and placed in the cassette at the position, which is farthest from the boat 2. Thereafter, the wafers are sequentially taken out of the wafer mounting positions, which are separated from the cassette farther, and transferred to the cassette 1, which are closer to the boat 2, in sequence.
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