| 摘要 |
PURPOSE:To obtain an array type ultrasonic transducer fitted for an electronic scanning by dividing at least either a movable electrode or a fixed electrode facing with the movable electrode formed on a vibration film, and making them into array. CONSTITUTION:A silicon oxide film 102 is formed in thickness of 1000Angstrom , and an aluminum film is formed in thickness of about 500Angstrom by a vacuum evaporation method on a silicon board 101, then being processed, and a split electrode 103 is formed. The width of one electrode is 0.63mm, and the length 20mm, and thirty-two pieces of electrodes with the pitch of 1mm are made into array, and a chip size is set as 35mmX25mm. Next, an appropriate tension is attached on the back plane of a polyester film having the thickness of 12mum, on all the surface on one side of which an aluminum having the thickness of about 500Angstrom is evaporated, and the film is stuck on the silicon board 101, and is fixed at both ends of the chip. At such a time, it is no necessary to stick an oxide film part 107 exposed between split electrodes because it is pulled with an electrostatic force, and an arrayed ultrasonic element can be constituted with a simple process.
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