发明名称 SEED CRYSTAL
摘要 PURPOSE:To prevent the thermal damage of the titled seed crystal without using a specific device by coating the surface of the seed crystal to be used when the single crystal of a III-V compd. is grown by a rotary pull method with a solid soln. consisting of alumina and diboron trioxide. CONSTITUTION:The surface of the seed crystal to be used when the compd. single crystal consisting of the group IIIb and group Vb elements of the periodic table is grown by a rotary pull method is coated with the solid soln. contg. 0.5-2.5wt% alumina and the balance diboron trioxide. The solid soln. is obtained by mixing alumina and diboron trioxide in the above-mentioned ratio, and then melting the mixture. When the seed crystal is coated with the solid soln., the seed crystal is immersed in the melt of the solid soln. obtained by heating the soln. at about 1,000-1,200 deg.C, then taken out, and cooled.
申请公布号 JPS62148396(A) 申请公布日期 1987.07.02
申请号 JP19850287528 申请日期 1985.12.20
申请人 MITSUBISHI MONSANTO CHEM CO;MITSUBISHI CHEM IND LTD 发明人 OKANO TAKESHI;YAJIMA FUMIKAZU;IBUKA TOSHIHIKO
分类号 C30B27/02;H01L21/18;H01L21/208 主分类号 C30B27/02
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