| 摘要 |
<p>Apparatus for providing microelectronic, intra-chip and chip-to-chip interconnections in an ultra-dense integrated circuit configuration. Compressive pedestals (20) are used to form spring-loaded electrical and mechanical interconnections to conductive terminals on an chip interface mesa and chip assembly (28) in order to form a large multi-chip array (23) on an interconnection substrate(24). Methods are also disclosed for fabricating the compressive pedestals (20).</p> |
