发明名称 Method of quality testing an electrode layer on a semiconductor component
摘要 <p>In a method of quality testing an electrode layer on a semiconductor component to which a contact wire is to be bonded, a ball made of a material which is identical or similar to the material of the contact wire is pressed against the electrode layer using a bonding capillary and the depth of the indentation produced in the electrode layer as a consequence of this pressure is measured.</p>
申请公布号 DE3641688(A1) 申请公布日期 1987.07.02
申请号 DE19863641688 申请日期 1986.12.06
申请人 MITSUBISHI DENKI K.K. 发明人 MACHIDA,KAZUMICHI;HIROTA,JITSUHO
分类号 G01N3/00;G01N3/42;H01L21/66;(IPC1-7):H01L21/66;B23K20/02;G01N3/40 主分类号 G01N3/00
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