| 摘要 |
PURPOSE:To maintain the specified initial amt. of the vapor of a silane coupling agent and to stably execute the treatment under a constant condition by reducing the pressure in a reduced pressure vessel contg. the silane coupling agent prior to the treatment then evaporating the agent up to a prescribed pressure. CONSTITUTION:The pressure in the reduced pressure vessel 1 is reduced down to the prescribed pressure to evaporate the silane coupling agent and thereafter the pressure in the 2nd reduced pressure vessel contg. a glass substrate 5 is reduced down to the prescribed pressure. The evaporation of the silane coupling agent progresses in the vessel 1 and after the pressure therein increases up t the prescribed pressure, gaseous nitrogen is introduced into the vessel 1 until the atm. pressure is restored in the vessel. A valve 4 is then opened to introduce the gaseous nitrogen and the silane coupling agent vapor in the vessel 1 into the reduce pressure vessel 2 where the surface of the substrate 5 is treated for the prescribed time. The valve 4 is closed upon lapse of the prescribed time and the substrate 5 is taken out of the vessel 2. The treatment with the silane coupling agent is thus completed. |
