Ultra high vacuum valve

摘要

Ultra high vacuum valve in which a valve plate can be swivelled either into a position in which it is in contact with a valve seat or into a position in which it is removed from the valve seat, this being accomplished by operating a piston-cylinder unit which opens or closes the valve by swivelling the valve disc, and in which the valve disc is pressed against the valve seat when in contact with the latter, this being accomplished by means of a device which has a push rod mounted so as to be movable on a valve housing, close to one end of the valve disc when the latter is in contact with the valve seat, and in which a piston-cylinder unit is provided to press the push rod against a side face of the other end of the valve disc.