| 发明名称 |
UN DISPOSITIVO PARA MEDIR UNA MAGNITUD |
| 摘要 |
<p>The magnitudes of physical variables are sensed by measuring the resonant frequency of a vibratable structure (21). The structure (21) is of micromechanical form, conveniently etched from a wafer of semi conductor material, and is caused to vibrate by incident optical energy delivered via fibre optic wave guides (20) from a source (18) such as a laser.</p> |
| 申请公布号 |
ES552421(D0) |
申请公布日期 |
1987.07.01 |
| 申请号 |
ES19210005524 |
申请日期 |
1986.02.26 |
| 申请人 |
UNIVERSITY OF STRATHCLYDE |
发明人 |
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| 分类号 |
G01D5/26;G01H9/00;G01L9/00;(IPC1-7):G01H13/00 |
主分类号 |
G01D5/26 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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