摘要 |
PURPOSE:To form an integrated type amorphous solar cell of large area in which plural unit cells are connected in series a on large-area insulating substrate of high areal efficiency with high productivity by dividing layers by irradiation with laser beams. CONSTITUTION:A first electrode layer 2 is laminated on a substrate 1 and it is divided according to a pattern of unit cell by laser beam irradiation technique. An amorphous semiconductor layer 3 is laminated over the whole surface of the divided first electrode layer 2, namely that including dividing grooves 6, and connection grooves 7 are cut along the dividing grooves 6 to divide the layer into units. An isolation resin layer 4 composed of an electrically insulating resin for dividing a second electrode layer 5 is arranged on the amorphous semiconductor layer 3. Next, the second electrode layer 5 is deposited uniformly over the whole surface of the amorphous semiconductor layer 3 including the part in the connection grooves 7 and over the isolation resin layer 4. Isolation grooves 8 are cut on the isolation resin layer 4 by laser beam irradiation to divide the layer into a pattern. |