DEVICE FABRICATION USING GAS-SOLID PROCESSES,申请号EP19820106362-传众专利搜索

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发明名称	DEVICE FABRICATION USING GAS-SOLID PROCESSES
摘要
申请公布号	EP0070523(B1)	申请公布日期	1987.07.01
申请号	EP19820106362	申请日期	1982.07.15
申请人	WESTERN ELECTRIC COMPANY, INCORPORATED	发明人	DONNELLY, VINCENT MICHAEL;FLAMM, DANIEL LAWRENCE;KARLICEK, ROBERT FRANK, JR.
分类号	H01L21/302;C23C16/52;C23F4/00;G01N21/64;H01L21/205;H01L21/3065;H01L21/31;(IPC1-7):H01L21/66	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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