| 摘要 |
PURPOSE:To make a quick etching treatment of large quantities by covering the unetching part of glass waveguide parts having smooth surfaces with a hydrogen fluoride resistant material and removing the part not covered with the hydrogen fluoride resistant material in a hydrogen fluoride soln. CONSTITUTION:The parts, except the etching parts, on the surface of waveguide parts 1 and the other surface of the waveguide parts 1 are masked with a coal tar 2 to permit etching of only the ends of an optical circuit part 4 and such parts are put into a resin vessel 6 contg. a hydrogen fluoride soln. 5. The optical circuit device having the grooves to permit the connection to optical fibers in the waveguide parts 1 is formed when the coal tar 2 is removed in the org. solvent. Since the glass is an isotropic medium, the grooves are wider in the parts to be etched from the surface 7 of the waveguide parts 1 and since the surface 7 of the waveguide parts 1 is smooth, the surface of the etched parts 8 is smooth as well and there are no problems such as loss in the connection to the optical fibers, etc. The quick etching treatment of large quantities of the glass waveguide parts is thereby made possible. |
