| 摘要 |
PURPOSE:To keep the area of equipment in an ultra clean degree and facilitate the maintenance of the equipment as well as the carrying of material into and out of the area of equipment by a method wherein a plurality of ventilating holes are provided between the area of equipment and the area of passages while a partitioning member, movable into left-and-right or up-and-down, is provided therebetween. CONSTITUTION:A plurality of front surface panels 37, 37..., divided so that the side ends thereof are superposed mutually, is attached as a partitioning member which defines the area A of equipment from the area B of passages. A plurality of ventilating holes 38, 38 are formed on a transparent rectangular plates so as to be arranged uniformly on the whole of the surface substantially while running wheels 39a, 39a are attached to the upper part thereof so as to be moveable on rails 39, 39. Further, predetermined clearance is provided between the lower end of the plate and the upper surface of a floor 28 to form a ventilating port 40, through which air in the area A of equipment flows out into the area B of passages. The ventilating holes 38 are made so as to be a bell-type opening, for example, in order to reduce the resistance of air and prevent the generation of eddies. |
