| 摘要 |
A laminar diaphragm (16) for use in a pressure transducer (10) comprised of two or more layers (50, 52, 54). The pressure boundary membrane (50) free of machining defects is supported by one or more support members (52, 54) having a fluid passage therethrough (56, 58). The support members (52, 54) are hermetically sealed around the periphery of fluid passages (56, 58) to the pressure boundary membrane (50) such that when the laminar diaphragm (16) is sealed in the pressure transducer (10) deflection of the pressure boundary membrane (50) within the regions of fluid passage (56, 58) in support members (50, 52) accurately indicates pressure.
|
