POSITIONING ALIGNING DEVICE FOR MASK FILM FORMING DEVICE

摘要

PURPOSE:To make the edge part of a thin film pattern clear by pressing the edge part of the pattern of the 1st mask against a substrate by flat springs through the 2nd mask having a pattern larger than the pattern of the 1st mask so that no gap is left between the edge part and the substrate. CONSTITUTION:The 2nd mask 21 having a pattern 21a similar to and slightly larger than a pattern 4a of a prescribed shape formed in the 1st mask 4 is pressed by flat springs 18. The edge part of the pattern 4a of the 1st mask 4 is pressed against a substrate 5 through the 2nd mask 21 under a prescribed pressure so that no gap is left between the substrate 5 and the edge part.