FORMATION OF ORGANIC PROTECTIVE FILM

摘要

PURPOSE:To improve the protective characteristics by combining an apparatus for forming a thin film in vacuum with a plasma polymerizing device and by polymerizing a monomer introduced into the vacuum vessel on a thin film so as to form a dense polymer film without deteriorating the thin film. CONSTITUTION:A thin film is formed on a substrate 10 with the device for forming a thin film in vacuum. A monomer is ten introduced into the vacuum vessel 5 from a monomer tank 1. At the same time, bias voltage is applied to the thin film on the substrate 10 to generate active ions of the monomer and a polymer is produced on the thin film by polymn., forming a protective film.