发明名称 |
LOW-ENERGY SCANNING TRANSMISSION ELECTRON MICROSCOPE |
摘要 |
<p>LOW-ENERGY SCANNING TRANSMISSION ELECTRON MICROSCOPE Low-energy scanning transmission electron microscopy is achieved by using a sharply pointed electrode as a source of electrons having energies less than 10 eV and scanning the electron emitting pointed source across the surface of a self-supported thin film of material to be investigated at an essentially constant distance on the order of nanometers. The electrons transmitted through the specimen are sensed by a suitable detector and the output signal of the detector is used to control a display unit, such as a CRT display or a plotter. A scanning signal generating means simultaneously controls both the scanning of the electron emitting point source and the display unit while a separation control unit holds the distance between the point source and surface at a constant value. The electron emitting point source and associated mechanical drives as well as the specimen film and electron detector are all positioned in a vacuum chamber and isolated from vibration by a damped suspension apparatus.</p> |
申请公布号 |
CA1223678(A) |
申请公布日期 |
1987.06.30 |
申请号 |
CA19860499555 |
申请日期 |
1986.01.14 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
SMITH, DAVID A.;WELLS, OLIVER C. |
分类号 |
H01J37/28;G01N27/00;G12B21/00;H01J37/26;(IPC1-7):H01J37/28 |
主分类号 |
H01J37/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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