DEPOSITED FILM FORMING DEVICE

摘要

PURPOSE:To improve the speed of film formation and the quality of films by blowing a gaseous raw material for forming the deposited film and gaseous halogen oxidizing agent which oxidizes the same from a gas supply opening made into a convergent multiple tube construction. CONSTITUTION:The gaseous raw material and the gaseous halogen oxidizing agent which oxidizes the same are blown from the gas supply opening made into the multiple tube construction having a convergent top end into reaction space. These materials are brought into chemical contact with each other, by which a precursor is formed. The precursor is deposited as a supply source for the deposited element onto a substrate, by which the film is formed.