发明名称 |
Method and apparatus for feeding drug liquid from hermetic returnable can |
摘要 |
An apparatus for feeding a variety of doping liquid used in doping-liquid treatment processes for electronic materials such as semiconductors and precision machinery components, and a feeding monitor apparatus. More specifically, it relates to an apparatus for stably feeding the doping liquid while detecting its volume, in the case where the doping liquid is fed from a liquid-filled hermetic returnable can to the doping liquid treatment process, and a feeding monitor apparatus is connected between the returnable can and treatment process.
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申请公布号 |
US4676404(A) |
申请公布日期 |
1987.06.30 |
申请号 |
US19840660412 |
申请日期 |
1984.10.12 |
申请人 |
NIPPON ZEON CO., LTD.;FUJITSU LIMITED |
发明人 |
YAMAZAKI, MASAHIRO;IIZUKA, SHIGERU;KAMIYA, SHIGEMITSU;OKA, YOSHIRO;FUJINO, KATSUHIRO |
分类号 |
B67D7/72;(IPC1-7):B67D5/00 |
主分类号 |
B67D7/72 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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