发明名称 MANUFACTURE OF THIN FILM MAGNETIC HEAD
摘要 PURPOSE:To obtain a head having a gap depth processed with a high accuracy by executing the patterning after forming with a pattern to provide the difference at the upper and lower magnetic film length to sandwich a gap film. CONSTITUTION:When an upper part magnetic film 11 is formed, the film is made shorter in a gap depth direction 3 from a lower part magnetic film 12, and from the point of a gap depth dimension zero 14, dimensions 15 in the gap depth direction of the upper part magnetic film is specified to the same dimensions as the gap depth dimensions. Thus, since the reference pattern necessary to the gap depth and a track width can be made common, the high accuracy of the gap depth dimensions can be executed and a higher characteristic thin film magnetic head processing can be sufficiently executed. Since the pattern, which comes to be the standard of the gap depth processing, and the track width are located on the same position and in the measuring work in the dimension processing, measuring can be executed with a high accuracy, the high yield can be obtained.
申请公布号 JPS62145525(A) 申请公布日期 1987.06.29
申请号 JP19850286433 申请日期 1985.12.19
申请人 SEIKO EPSON CORP 发明人 SAKAGAMI EIMATSU
分类号 G11B5/31 主分类号 G11B5/31
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