发明名称 ION IMPLANTATION MONITOR
摘要 PURPOSE:To dispense with the offset adjustment and gain adjustment of an A/p converter, which need to be done in a conventional art, by determining a full-scale value from the error of the A/p converter before the input of monitoring data into a processing unit so as to obtain precise monitoring data. CONSTITUTION:A switch circuit 3 for the detection of correcting data is put in a third mode, the input signal to an analog/pulse converter 4 is made zero and a count signal from a counter circuit 8 is entered so that a processing unit calculates the offset error of the analog/pulse converter 4. The switch circuit 3 is put in a second mode, the input signal to the analog/pulse converter 4 is set at a reference value and the count signal from the counter circuit 8 is entered so that the processing unit calculates the gain error of the analog/ pulse converter 4. After that, the switch circuit 3 is put in a first mode, a monitoring analog signal is applied to the input terminal of the analog/pulse converter 4 and the count signal from the counter circuit 8 is entered. As a result, precise monitoring data can be calculated on the basis of the offset error and the gain error, and correction work for obtaining the precise monitoring data is not needed.
申请公布号 JPS62145636(A) 申请公布日期 1987.06.29
申请号 JP19850284948 申请日期 1985.12.18
申请人 NISSIN ELECTRIC CO LTD 发明人 SATO SHIGEO;NISHIMURA SOJI;TANIGAWA YOSHIHIKO
分类号 H01L21/265;H01J37/317 主分类号 H01L21/265
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