| 摘要 |
PURPOSE:To perform invariably optimum control over the braking of a moving body by selecting one optional transmission characteristic among plural characteristics for a deviation signal as a driving control command supplied to the driving system for the moving body and performing phase compensation. CONSTITUTION:When the stopping and positioning control over an XY stage ST as the moving body is performed, a central processor CP controls the speed of the XY stage ST firstly. At this time, the central processor CP sets an analog switch SW so that no control signal passes through compensating circuits COM 1-COMn. When the XY stage ST moves to at predetermined distance in front of a target position, the central processor CP outputs a control signal corresponding to the position deviation of the XY stage. At the same time, the central processor CP selects a compensating circuit which is used currently according to the vibration pattern at the time of last positioning and outputs a command to the analog switch SW. Consequently, phase compensation required for the control signal is performed.
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