发明名称 SEMICONDUCTOR MEMORY DEVICE
摘要 PURPOSE:To produce a semiconductor memory device without normal resin coating for preventing an alpha-ray by composing to remove a software error. CONSTITUTION:A p<+> type region 7 of 10<14>-10<18>cm<-3> of impurity density is formed to contact with an n<+> type region 6 on a p<-> type semiconductor substrate 1 having 10<13>-10<16>cm<-3> of an impurity density. A p<+> type region 130 having 10<14>-10<18>cm<-3> of an impurity density is formed on the substrate 1 to contact with an n<+> type region 80 to become one source/drain regions, to connect with the region 7 and not to fall in a channel region under a second gate insulating film 5. Further, a p<+> type region 131 having 10<14>-10<18>cm<-3> of impurity density is formed on the substrate 1 to contact with an n<+> type region 81 connected with a bit line to become other source/drain region so as not to fall within the channel region under the film 5.
申请公布号 JPS62145861(A) 申请公布日期 1987.06.29
申请号 JP19850288208 申请日期 1985.12.20
申请人 MITSUBISHI ELECTRIC CORP 发明人 INUISHI MASAHIDE;SHIMIZU MASAHIRO;TSUKAMOTO KATSUHIRO;SHIMANO HIROKI
分类号 H01L27/10;G11C11/34;H01L21/8242;H01L27/108 主分类号 H01L27/10
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