发明名称 |
SEMICONDUCTOR MEMORY DEVICE |
摘要 |
PURPOSE:To produce a semiconductor memory device without normal resin coating for preventing an alpha-ray by composing to remove a software error. CONSTITUTION:A p<+> type region 7 of 10<14>-10<18>cm<-3> of impurity density is formed to contact with an n<+> type region 6 on a p<-> type semiconductor substrate 1 having 10<13>-10<16>cm<-3> of an impurity density. A p<+> type region 130 having 10<14>-10<18>cm<-3> of an impurity density is formed on the substrate 1 to contact with an n<+> type region 80 to become one source/drain regions, to connect with the region 7 and not to fall in a channel region under a second gate insulating film 5. Further, a p<+> type region 131 having 10<14>-10<18>cm<-3> of impurity density is formed on the substrate 1 to contact with an n<+> type region 81 connected with a bit line to become other source/drain region so as not to fall within the channel region under the film 5. |
申请公布号 |
JPS62145861(A) |
申请公布日期 |
1987.06.29 |
申请号 |
JP19850288208 |
申请日期 |
1985.12.20 |
申请人 |
MITSUBISHI ELECTRIC CORP |
发明人 |
INUISHI MASAHIDE;SHIMIZU MASAHIRO;TSUKAMOTO KATSUHIRO;SHIMANO HIROKI |
分类号 |
H01L27/10;G11C11/34;H01L21/8242;H01L27/108 |
主分类号 |
H01L27/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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