发明名称 PROTECTING DIODE FOR COMPOUND SEMICONDUCTOR DEVICE
摘要 PURPOSE:To very much reduce a capacity value by ion implanting a second diffused region thinner in impurity concentration and shallower in depth than a first diffused region. CONSTITUTION:A second diffused region 4 is formed by ion implanting thinner in impurity concentration and shallower in depth than a first diffused region 3. Since the region 4 to be superposed with the region 3 is lower in impurity concentration, a superposed portion 5 has substantially the same in impurity concentration and in conductivity type as those in the region 3. Thus, since a junction 6 for generating a capacity is a longitudinal part and the capacity is generated only in the junction 6, it becomes smaller.
申请公布号 JPS62145877(A) 申请公布日期 1987.06.29
申请号 JP19850288326 申请日期 1985.12.20
申请人 SANYO ELECTRIC CO LTD 发明人 ASANO TETSUO
分类号 H01L29/812;H01L21/338;H01L29/80;H01L29/866 主分类号 H01L29/812
代理机构 代理人
主权项
地址