| 摘要 |
PURPOSE:To improve the transfer characteristic of a minute bubble by providing a laminated layer to an ion implanting layer forming a bubble transfer line by external force or onto a protection film, exerting uniform internal stress and applying distortion and applying stabilized heat processing of the ion implanting layer in this state. CONSTITUTION:The ion implanting layer 3 is formed on a bubble film 2 formed on a base 1 via a mask pattern and after the mask pattern is removed, a protection layer 4 is formed on the ion implanting layer 3 and a laminated film 5 is coated to apply the internal stress to the ion implanted layer 3. Then heat treatment for stabilizing the layer 3 in the state of the ion implanting transfer line is performed. Thus, an excellent bubble transfer margin is obtained without causing malfunction on the transfer line.
|
