| 摘要 |
PURPOSE:To improve the productivity of solar cells, by continuously running mask web for forming thin-film patterns together with substrate web and overlaying the thin-film patterns on the substrate while deviating the position of the thin-film patterns by means of thin-film pattern control bars. CONSTITUTION:A vacuum container 10 contains a reel 12, flexible substrate web 11 wound on the reel 12 and flexible mask web 13 wound on a reel 14. The mask web 13 is provided with mask patterns for forming underlying electrodes. The mask web 13 also has sprocket holes along both ends with respect to the axial direction, the sprocket holes being formed at the same pitch with that of the substrate 11. A drive sprocket 34 is driven by a motor in the direction as indicated by the arrow A, for continuously conveying the substrate web 11 together with the mask web 13 overlaid thereon. Control for deviating the position of the thin film pattern by predetermined distances is carried out by changing the diameters of thin-film pattern control bars 22 and 29 or the distance between the substrate 11 and the control bars 22 and 29. |
