| 摘要 |
PURPOSE:To simply form a plane waveguide, and to easily control a pattern width by forming a desired waveguide pattern on a substrate by etching, and thereafter, accumulating continuously a clad layer, a core layer, and a clad layer. CONSTITUTION:First of all, a flat substrate 1' is prepared, and other part than an optical waveguide part is covered with, for instance, a photoresist 4, and a substrate 1 having a groove is formed by means of etching, etc. Subsequently, a clad layer 2, a core layer 3, and a clad layer 2' are accumulated successively on the substrate 1, and by cutting it, an optical waveguide is obtained. As for the substrate, usual quartz or silicon is used. As a method for accumulating successively the clad layer and the core layer on the substrate having the groove, a chemical gaseous phase accumulating method is used. In this way, a plane waveguide is formed simply, a pattern width is easily controlled, and the mass-producing property can be improved. |
