| 摘要 |
PURPOSE:To make progress the process of manufacture by making a work and a process history thereof correspond with each other by a method wherein a memory medium, in which a process progressing data is memorized as the updatable data, is provided in a means in which the work is stored and transferred by lot unit, and the data of the memory medium is updated in accordance with the result of the processing. CONSTITUTION:A recording medium 2 is built-in in a means, in which a wafer cassette 1 and the like is stored and transferred, in the state wherein the input- output terminal of the recording medium 2 is exposed to outside. After the initially set data has been written-in by a lot unit work order issuing station 5 through the transceiver T/R of an LAN 8, the recording medium 2 is sent to a work station as a work executing unit together with a cassette 1. At a station 6, the work and the inspection based on the program registered in a control device 61 are performed through the intermediary of the transceiver, the result of the processing is recorded in the recording medium 2, and then it is transferred to a data controlling and analyzing station 7. At a station 7, the result of work is analyzed and a data to be updated is sent to the control device 6.
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