| 摘要 |
PURPOSE:To reduce the thickness and size of a sensor by forming the vacuum deposited film of an RbAg4Is solid electrolyte as a sensor material on the surface of an insulating substrate. CONSTITUTION:An alumina substrate is used as the insulating substrate 5 and an Au electrode 2' is formed thereon by a vacuum deposition method. The RbAg4Is solid electrolyte 1 is then formed by vacuum deposition on the substrate 5 by heating the RbAg4Is put into a tungsten boat. An Au electrode 2 is coated thereon and silver nitrate 3 is coated thereon. Leads 4, 4' are attached to the electrodes. The thickness and size of the sensor are reduced in the above- mentioned manner. |
