| 摘要 |
PURPOSE:To make both mixed crystal with its rate changed and mixed crystal at a fixed rate of constitution grow with superior reproducibility, by using a plurality of molecular beam source cells which are different in their volume to accommodate molecular beam materials consisting of aluminum. CONSTITUTION:Molecular beam source cells 3a, 3b, and 3c are made to be cells of 16cc in crucible volume, molecular beam source cell 3s being a small- sized cell of 5cc or so in crucible volume, with heating capacity of a heater being the same or so. Al molecular beam sources are stored in the large-sized molecular beam source cell 3 and the small-sized molecular beam source cell 3s by the use of such a growth device, and heating fusion are performed. In case that crystal of fixed constitution is made to grow, Al is made to evaporate from the large-sized molecular beam source cell 3c. In case that crystal with is mixed crystal rate being changed is made to grow, Al is made to evaporate from the small-sized molecular beam source cell 3s to control the heating amount of the heater in the molecular beam source cell 3s. Thus, superior following property to a constitutional change improves reproducibility in growth of a mixed crystal layer.
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