| 摘要 |
<p>PURPOSE:To permit a dyeing treatment of color filters in a substrate unit and the continuous treatment from the developing to dyeing and drying of the color filters in the substrate unit when a developing soln. supply port is added by constituting a dyeing vessel of a substrate or chuck and dyeing liquid receiver and sealing member. CONSTITUTION:The substrate 6 and the dyeing liquid receiver 2 are disposed via a sealing member 3 and therefore, the cup-shaped vessel is constituted of these three members. The color filter 7 is eventually immersed into the dyeing liquid 5 and is dyed when the dyeing liquid 5 is poured into such vessel from the supply port 1. The chuck 4 fixes the substrate 6 thereon by vacuum suction. The chuck is required to act the force to pinch the seal 3 therebetween when the prevention of the leakage of the liquid from between the substrate 6 and the receiver 3 is needed and therefore, the chuck 4 sucks the substrate 6 with the force larger than the required pinching force.</p> |
