| 摘要 |
PURPOSE:To shorten a time for handling a wafer and also to prevent the slippage in position of the orientation flat of the wafer, by conducting the transfer of the wafer by means of a holder for retention and a holder for transfer which are disposed so that the respective wafer transfer members are positioned at substantially equal distance and angle from a prescribed central point. CONSTITUTION:Conveyor belts 20a and 20b and a platen 40 as a holder for wafer treatment are provided, and these are disposed so that wafer transfer members for transfer of a wafer 2 between holders 26a and 26b are positioned at substantially equal distance and angle from the center of the axis 22 of rotation. A turntable 34 provided below a wafer transfer portion located at the fore end of the conveyor belt 20a has a function of elevation and a function of rotation, elevating and rotating the supplied wafer 2 so as to position the orientation flat 3 thereof. The platen 40 is joined to a rotary shaft 8 and is put in an erected state for treatment of the wafer 2 and in a horizontal state for setting and removal (replacement) of the wafer 2.
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