MANUFACTURE OF PHOTOELECTRIC CONVERSION DEVICE

摘要

PURPOSE:To form a thin-film body having light transmission by forming the thin-film consisting of an oxide containing lead and chromium and heat treating the thin-film in an atmosphere containing at least lead. CONSTITUTION:A sintered body consisting of Pb2CrO5 is used as a target, and a thin-film composed of Pb2CrO5 is shaped onto a glass substrate through an electron-beam evaporation method. The degree of vacuum during evaporation is kept at 4X10<-5>Torr. The glass substrate acquired in this manner is thermally treated for 1.5hr at 450 deg.C in an atmosphere in which Pb2CrO5 sintered powder is held in an aluminum crucible. The electron-beam evaporated Pb2CrO5 thin-film under an amorphous state is crystallized through the heat treatment. Pb2CrO5 powder prevents the separation of the component of Pb from the Pb2CrO5 thin- film.