摘要 |
PURPOSE:To form a thin-film body having light transmission by incorporating a specific quantity or less of a quadrivalent metallic element in MO2 to the oxides of a specific quantity of lead and chromium and using the mixture as a target. CONSTITUTION:Oxides including a quadrivalent metallic element of 55mol% or less calculated in terms of MO2 (M represents the quadrivalent metallic element) to the composition of lead of 30-99.5mol% calculated in terms of PbO and chromium of 0.5-70mol% calculated in terms of Cr2O3 are employed as a target, and a thin-film consisting of the oxides containing said lead and chromium is shaped in a vacuum. The thin-film is heat treated in an atmosphere including at least lead. Si, Zr, etc. can be used as the quadrivalent metallic element, and the oxide formed by these elements is added, thus acquring the same effect as TiO2. Electromotive force is hardly generated even on a thin-film composed of not less than 55mol% TiO2. Accordingly, the thin-film having light transmission is obtained, thus improving the conversion efficiency of the operation of a photoelectric conversion device.
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