| 摘要 |
PURPOSE:To make it possible to check the faults or wire breakdown of light emitting elements and light receiving elements without applying pressure, by providing the light emitting elements, the light receiving elements, which receive the light from the light emitting element, and a diaphragm, which converts the change in pressure into mechanical displacement. CONSTITUTION:Three pairs of a light emitting element 49a and a light receiving element 50a, a light emitting element 49b and a light receiving element 50b, and a light emitting element 49c and a light receiving element 50c are provided so as to face each other through a light shielding plate 45 on one plane, which is in parallel with a diaphragm 34. A shielding plate 52 having a slit 5, which passes only the light in front of the light receiving elements 50a, 50b, and 50c, is provided between the light receiving elements 50a, 50b, and 50c and the light shielding plate 45. When a pressure, which is applied on the diaphragm 34, is an atmospheric pressure, all the right beams from the light emitting elements 49a-49c reach the light receiving elements 50a-50c. The change in pressure in converted into mechanical change by the diaphragm 34. An air chamber 39 is formed between the diaphragm 34 and a lid 36. Thus the faults or wire breakdown of the light emitting elements or light receiving elements can bae checked without applying pressure. |
