| 摘要 |
PURPOSE:To obtain a circuit for generating no voltage division error, by making resistance values of each unit resistance equal, by constituting the titled circuit of plural unit resistance layers which are formed on a substrate, and plural wiring layers consisting of a connecting part for connecting in series said unit resistance layers, and a leading-out part for fetching a voltage between the unit resistance layers. CONSTITUTION:A unit resistance layer 1 consists of polycrystal silicon which is formed selectively through an insulating film on a substrate, and wiring layers 2, 3 which are formed selectively through an insulating film for covering the whole surface are provided with connecting parts 2a, 3a being in the vicinity of a through-hole 4 which contacts the unit resistance layer 1, and leading-out parts 2b, 3b for fetching a voltage. To both ends of the unit resistance layer, reference voltages V1, V2 are applied, and a split voltage is fetched from the leading-out parts 2b, 3b of the wiring layers 2, 3. In such a case, the unit resistance consists of the series sum of a resistance Ru by the unit resistance layer 1, a wiring resistance RA of the wiring layer 2 or 3 itself, and a contact resistance Rc by a connection of the wiring layer to the unit resistance layer, and the constitution of any unit resistance is the same, therefore, a difference of the resistance value is not generated at every unit resistance.
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