| 摘要 |
PURPOSE:To make the center line in the conveying direction of a substrate conform accurately and easily to the center line in the conveying direction of the substrate conveying device by providing a substrate floating device which makes said substrate float up from a roller while operating a substrate center position conforming device. CONSTITUTION:A substrate conveying device II consists of a substrate center position conforming mechanism 7 and a substrate floating mechanism 8, and is connected to a film separating device I. Substrate position conforming members 7B, 7B' are brought into contact with the end part in the width direction of a substrate being conveyed on a substrate conveying passage A-A, to conform the center line in the conveying direction of the substrate to the center line in the conveying direction of the device II. And, the substrate floating device 8 floats up the substrate so as to reduce frictional force between the substrate and a conveying roller 2 or a conveyance control roller 3 while operating the substrate center position conforming mechanism 7. Thereby, the center lines can be conformed accurately and easily without causing a crook, damage, etc. to the substrate.
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