发明名称 |
A monolithic integrated circuit, particularly of either the MOS or CMOS type, and method of manufacturing same. |
摘要 |
<p>A monolithic integrated circuit of either the MOS or CMOS type comprises an intermediate layer (8) of polycrystalline silicon, a layer (9) of a silicide of a refractory metal overlying said polycrystalline silicon layer (8), and regions (8a) of preset area and preset paths (9a) formed in the polycrystalline silicon layer (8) and the silicide layer (9); the preset area regions (8a) and preset paths (9a) forming respectively high resistivity resistances and low resistivity interconnection lines for an intermediate connection level. </p> |
申请公布号 |
EP0226549(A1) |
申请公布日期 |
1987.06.24 |
申请号 |
EP19860830293 |
申请日期 |
1986.10.09 |
申请人 |
SGS MICROELETTRONICA S.P.A. |
发明人 |
MAGGIONI, FRANCO;BALDI, LIVIO;CAPPELLETTI, PAOLO GIUSEPPE |
分类号 |
H01L27/092;H01L21/3205;H01L21/768;H01L21/8234;H01L21/8238;H01L23/52;H01L23/528;H01L23/532;H01L27/06;H01L27/088;H01L29/78 |
主分类号 |
H01L27/092 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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