发明名称 A monolithic integrated circuit, particularly of either the MOS or CMOS type, and method of manufacturing same.
摘要 <p>A monolithic integrated circuit of either the MOS or CMOS type comprises an intermediate layer (8) of polycrystalline silicon, a layer (9) of a silicide of a refractory metal overlying said polycrystalline silicon layer (8), and regions (8a) of preset area and preset paths (9a) formed in the polycrystalline silicon layer (8) and the silicide layer (9); the preset area regions (8a) and preset paths (9a) forming respectively high resistivity resistances and low resistivity interconnection lines for an intermediate connection level. </p>
申请公布号 EP0226549(A1) 申请公布日期 1987.06.24
申请号 EP19860830293 申请日期 1986.10.09
申请人 SGS MICROELETTRONICA S.P.A. 发明人 MAGGIONI, FRANCO;BALDI, LIVIO;CAPPELLETTI, PAOLO GIUSEPPE
分类号 H01L27/092;H01L21/3205;H01L21/768;H01L21/8234;H01L21/8238;H01L23/52;H01L23/528;H01L23/532;H01L27/06;H01L27/088;H01L29/78 主分类号 H01L27/092
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