| 摘要 |
PCT No. PCT/JP84/00237 Sec. 371 Date Dec. 21, 1984 Sec. 102(e) Date Dec. 21, 1984 PCT Filed May 10, 1984.A temporal variation in a fluid pressure of a fixed value applied to an article under inspection, or in the differential pressure between it and a fluid pressure applied to a comparison tank, is measured, and the measured value is compared with a reference value, thereby judging whether the airtightness of the article under inspection is good. Of the measured pressure or differential pressure data, data on the inspected articles judged non-defective are stored, by a predetermined number, in accordance with individual temperature differences between them and the comparison tank, or temperature differences between them a reference temperature, and a mean value of the stored data is calculated for each temperature difference. This mean value is used as a correction value for correcting, for each temperature difference, the measured pressure or differential pressure data on articles subsequently inspected.
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