| 摘要 |
PURPOSE:To secure a highly accurate sample analysis with no influence from a leakage electric field or magnetic field, and to make it possible to analyze adequately a sample with an irregular surface, by furnishing beam permeant holes to permeate either irradiation beams or emission beam at the inner tube and the outer tube electrodes respectively. CONSTITUTION:The electron beams from an electron beam source 6 outside an outer tube electrode 4 are radiated over a sample 7 through beam permeant holes of the electrode 4 and of an inner tube electrode 3 to emit Auger electrons from the sample 7, by which the element analysis of the sample 7 surface is performed by an electron detector 5. The analysis by the other kind irradiating beams is also performed by radiating necessary beams radiated from the outside of the energy spectroscope 1 through the beam permeant holes of the electrodes 3 and 4 to the sample 7 in the same manner. Therefore, the angle of the irradiating beams to the sample and the emitting beams from the sample can be set deep to the surface of the sample 7, and the influences of the electric field or the magnetic field owing to a leakage of the beam source to the inside of the electrode 3 and around the sample 7 can be prevented since the electron beam source is arranged outside the electrode 4. |
