发明名称 |
Method and apparatus for inspecting surface defects on the magnetic disk file memories |
摘要 |
Method and apparatus for inspecting surface defects of a sample in which oblique illumination is applied onto a surface of the sample and in which illuminance of reflected beams generated from the surface is measured. Shading plate having double pinholes or double slits is used as means for shading a scattered beam from aventurine prominences of the sample surface to fully shade the scattered beam so that the inspection is accurately executed.
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申请公布号 |
US4674875(A) |
申请公布日期 |
1987.06.23 |
申请号 |
US19840679358 |
申请日期 |
1984.12.07 |
申请人 |
HITACHI, LTD. |
发明人 |
KOIZUMI, MITSUYOSHI |
分类号 |
G01N21/95;(IPC1-7):G01N21/89 |
主分类号 |
G01N21/95 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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