| 摘要 |
PURPOSE:To make preliminary ionization uniform and to make a main discharge uniform by arranging a plurality of projections on a surface of an auxiliary electrode corresponding to a dielectric arranged on a back side of a main electrode. CONSTITUTION:A high voltage from a high-voltage power source 1 of a pulse laser device is applied between first and second main electrodes 2 and 3 and a laser medium is excited by a uniform glow main discharge 8 so as to emit laser beams from an optical axis 9. An auxiliary electrode 5 is arranged on a back side of the main electrode comprising openings 7 through a dielectric 4 and a plurality of projections are formed on the surface of the auxiliary electrode 5 which is in contact with the dielectric 4. Furthermore, a high voltage from an auxiliary power source 6 is applied between the main electrode 3 and the auxiliary electrode 5 and an auxiliary discharge is generated from the many projections. Then, the auxiliary discharge makes preliminary ionization of the main electrode 3 uniform and accordingly the main discharge 8 uniform. |
